Table of Contents
Water and Chemical Usage Practical Considerations
Manufacturing
Wet Chemical Processing
Areas of Savings
Water Flow
PPT Slide
FLOW RESTRICTORS
DI Water Usage
How Much is Enough?
PPT Slide
Chemical Carryover
Piranha Rinse
Chemical Carryover
PPT Slide
Chemical Utilization
Process Changes
Bathlife Extension
SC1 Concentration
Hydrogen Peroxide Decomposition
Effect of Wafer Cycling Through Bath
HF Bathlife Extension
HF Bathlife Extension
Bathlife Extension
Concentrated HF Bathlife
PPT Slide
Acknowledgements
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Author: Tom Roche
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