Table of Contents
NSF/SRC CEBSM Teleconference February 24, 2000
CHE 458/598 Semiconductor Materials Processing
Delivery Modes
Student Diversity
Course Web Site
Blackboard CourseInfo 4.0
Web Site URL
PPT Slide
PPT Slide
PPT Slide
PPT Slide
PPT Slide
Powerpoint Slides
Learning Objectives
Molecular processes in D-G model
Model - Experiment comparison: wet ox
Thermal oxidation in the presence of halogens
Motivation for halogen use
Halogenic Thermal Oxidation
Chemical equilibrium constraint: extent expression simplified
Concerns with HCl
Point-of-use halogenic thermal oxidation with TCA
ES&H concern with 1,1,1-TCA
Remote Student - Instructor Interaction
PPT Slide
PPT Slide
Assignment Submission
Key concern: Student-Instructor Connection
Overall Performance S99
Feedback from Students I
Feedback from Students II
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