Table of Contents
Preliminary Thoughts on System Level Decision Support Tools for ESH in Semiconductor Manufacturing
Overview
Systems Engineering
ESH challenges in Semiconductor Manufacturing
Semiconductor Process Network Model
Multi-objective Optimization
Potential Thrust Areas Identified
Evaluation of New Technology
Example
Example cont.: Superstructure
Assessment of Recycling
Issues to Be Addressed
Mode of Operation of Tools
Issues to be addressed
Load on Treatment Facility
Summary
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