Table of Contents
Electrical and Material Properties of ALCVD ZrO2 Gate Dielectrics
Presentation Contents
Desirable Advanced Gate Dielectric Properties for Sub-0.1 mm MOSFET
ALCVD Reaction Cycle
Characteristics Features of ALCVD
PPT Slide
Electrical Measurements
Gate Structure / Measurement Setup
Leakage vs. EOT Comparison Between SiO2 and ZrO2 Dielectrics
J-V and C-V Characteristics of 13.8 Å EOT ZrO2 Dielectric
Film Uniformity
Frequency Dispersion
Hysteresis as a Function of Bias Sweep
PPT Slide
Material Characterizations
Synchrotron Angle Resolved XPS of Thin ALCVD ZrO2
Synchrotron XPS Differential Sputter Profile
AFM of As-Deposited ALCVD ZrO2
XTEM Analysis
XTEM Analysis
Annealing Studies
PPT Slide
Hydrogen Annealing
Summary/Tech Transfer of ALD ZrO2
Future Work
Future Work
Acknowledgements
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