J-V and C-V Characteristics of13.8 Å EOT ZrO2 Dielectric

• EOT was calculated from the accumulation capacitance of HFCV (1 MHz)

curves without accounting for quantum mechanical effects

• The thinnest EOT obtained thus far is 13.8 Å (physical thickness ~ 50 Å)

with a leakage of less than 10-7 A/cm2 at -1 V

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