XTEM Analysis
TEM image reveals that the 50 Å ZrO2 film is polycrystalline and that there is a 15 Å interfacial layer between ZrO2 and Si
- since the interfacial layer thickness is greater than the EOT (13-14 Å), the interfacial layer is not pure SiO2 and must have a moderate K value (either silicate or doped oxide)
- no evidence of silicide layer or precipitates as suggested by XPS
Fourier transform analysis of TEM micrograph confirms monoclinic crystal structure