GROWTH AND CHARACTERIZATION OF ZrO2 THIN FILMS GROWN BY UV-OZONE OXIDATION

Shriram Ramanathan

Dept. of Materials Science and Engineering, Stanford University

Pinkesh Sachdev and Krishna C. Saraswat

Dept. of Electrical Engineering, Stanford University

Carl J. Maggiore,

Ion Beam Materials Laboratory, Los Alamos National Lab

Paul C. McIntyre

Dept. of Materials Science and Engineering, Stanford University

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