Payoffs from Gas Phase Wafer Cleaning Technology

• Environmental

  • Reduce Water Consumption
    • Single fab currently requires 30 million gallons of makeup water per month.
  • Reduce Energy Use
    • Large quantities of air must be moved through wet bench and scrubbed.
  • Reduce Chemical Use
    • Purchase and disposal
    • Minimize worker exposure

• Technical

  • Surface tension effects
    • Uniform wetting
    • Drying
  • Cluster tool adoption
    • 12” wafer

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