PPT Slide
Gas Phase Cleaning: Issues
- Are the cleaning problems well defined?
- Where in the ic process flow would dry cleaning processes make the greatest impact?
- What should the metric be for surface cleanliness?
Gas Phase Cleaning: Outlook
- Potentially viable processes
- HF/vapor, UV-Cl2, UV-ClF3, UV-O2-F2, Chemical Downstream.
- Need much better understanding of fundamental chemistry.
- Must still convince industry that they perform
- Get away from water rinses to solve cleaning problems.