PPT Slide

CONCLUSIONS

1) infiltrating depends on liquid pressure, surface tension, contact angle and

Å@

trench diameter

2) infiltrating of HF into deep trenches is more difficult than that of water

3) infiltrating increases under low liquid pressure

FUTURE PLANS

1) experimentation of control factor (liquid pressure, surface tension )

with liquid infiltration into deep trenches by samples

Å@Å@Å@ÅE

SC-1, SC-2, pure water, HF, BOE

2) planning the etching model and the mechanism of removing particles in deep

trenches

3) The development of inhibitors removal technology

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