Outline

• Background & Motivation

  • Use of fluorocarbon (FC) as ILD
  • Choice of pulsed PECVD as processing technique
  • Effect of pulsing on films made from HFPO
    

• Objectives

  • Identification of environmentally benign FC monomers
  • Evaluation of film ILD properties
    

• Monomer Selection

  • Identification of 3 new monomers
  • Comparison of properties to select best monomers
    

• Comparison of 2 Best Monomers

  • Film Properties
    • surface morphology, adhesion, thermal stability
  • Integration Issues
    • gap-fill, etching
      

• Conclusions

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