ILD Materials
Fluorocarbon Thin Films
- Fluorinated diamond-like carbon (F-DLC)
- CFx
- Fluorinated amorphous carbon (FLAC)
PFCs are common precursors
- Memorandum of understanding between EPA and US semiconductor industry to reduce PFC emmisions (June ‘96)
- design new ILD process with this in mind
- “green chemistry” ? short & long-term cost & environmental benefits
Increasing F/C ratio generally
- reduces ?
- reduces thermal stability