Semiconductor Wafer Cleaning/RinsingProcess Monitoring and Control

Dr. D.S. Baer, S.I. Chou, Prof. R.K. Hanson

High Temperature Gasdynamics Laboratory

Department of Mechanical Engineering

Prof. C.R. Helms

Solid State Laboratory

Department of Electrical Engineering

Prof. A.J. Muscat

Department of Chemical Engineering

University of Arizona

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