Semiconductor Industry Water Use Challenge
- 1994 NTRS requires 50% reduction in water use by 1998.
- The 1997 NTRS will call for a raw water decrease from 30 to 10 gal/in2 (67% reduction ) by the year 2000.
- It has been demonstrated that much of our UPW is currently being wasted and could be used beneficially for improved rinse performance.
- S/C Wafer Fabs demand significant quantities of water in many communities. The problem is becoming acute in some regions.
- The ability to further expand in specific areas is limited.
- Based on past trends, 300 mm wafer processing will increase the use of water.
- Recycle of spent rinsewaters allows for better product water at the point of use.