PPT Slide

Feed

Tank

Pre-

Treatment

R.O.

Storage

Tank

UPW

Polishing

Storage

Tank

Polishing

Treatment

FAB

Process

Tools

Recycle

Storage

Tank

Monitoring/

Purification

UPW Return

UPW Supply

IWW

IWW

IWW

Recycle

Sensor/

Divertor

Sensor/

Divertor

Feed

2nd RO

Reject

1st RO

Reject

To Other

Reclaim

UF

Reject

Typical UPW System with Recycle

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