PPT Slide

ESH Design for Low ? ILDs

• Design initial chemistry to be ESH compatible
  • lowest cost
  • ESH benefit available from the start

• Lowest ? CVD/PECVD processes
  • FluorocarbonThin Films
    • fluorinated diamond like carbon (F-DLC)
    • CFx
    • fluorinated amorphous carbon (FLAC)
  • PFCs are common precursors
  • Increasing F/C ratio generally
    • reduces ?
    • reduces thermal stability
      

• CVD/PECVD vs. spin-on
  • solventless, no worker exposure to hazardous solvents
  • uniform, amorphous films
  • equipment compatible with current processing techniques

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