Fundamentals of Rinse and Chemical CarryoverSubtask C-2-1

Karla Romero, Dan Seif, Andrew Hebda, Andrea Vicars, Steven Bengis, Magdel Badenhorst, Thomas Peterson, Michael Zachariah

Department of Chemical and Environmental Engineering

University of Arizona

Doug Baer, S. Sanders, S.I. Chou, R. K. Hanson

Mechanical Engineering

Ron Chiarello, Hongmei Liao, Jim McVittie, Steven Tang, C. Robert Helms

Electrical Engineering

Stanford

Katsuhiro Ota, Yoichi Takahara, Hiroshi Kikuchi

Production Engineering Research Laboratory (PERL)

HITACHI

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

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