PPT Slide
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
- Objective: Monitor process chemical removal from deep trench for
theoretical modeling and fundamental understanding of
- ESH Impact: Understanding of rinse fundamentals will drive
water consumption down. This puts less strain
on fab communities in terms of necessary municipal
- Financial Benefit: Fabs save on municipal water usage, energy
use, DI water tank/pipe capacities, and water
treatment vessel capacities.