PPT Slide
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Previous Research - Nakao et. al
Nakao et al., “A Simulation Model for Wet Cleaning of Deep Trenches,” Journal of the
Electrochemical Society, Vol. 137, No. 7, July 1990, pp. 2303-5.
- Diffusion is the dominant factor effecting trench rinse rates.
- Higher bulk flow rates do contribute to faster trench rinse times.
- At common overflow rinse tank fluid velocities the trench is
diluted to 1 ppm within several seconds.
Illustrative flow velocity
vectors - bulk velocity is 1.5 cm/s
Effect of diffusivity variance at the bottom
of a 4 x 0.5 mm trench (Nakao et al.)
Effect of fluid velocity variance at the bottom
of a 4 x 0.5 mm trench (Nakao et al.)