PPT Slide
NSF/SRC
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Experimental Setup - Fluid Flow
UPW Source
H2SO4
Teflon
Metering
Rotometer
For calibration - Rinse simulation
runs will have acid predip
followed by only UPW flush
To Drain
All tubing is teflon
Flow Cell
Metering Pump
(Teflon/Viton
tubing)
3-way connector/
(open-close) valve
To Drain
3-way connector/
metering valve
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