PPT Slide
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Flow Cell Characteristics
Fully developed laminar flow
- Flow cell replicates flow between
- 2.5 cm flow development length (flow fully developed)
- Cell is rectangular (a x b: 3 mm x 5 mm)
- For rectangular cells (from Perry’s): rhyd = ab/2(a+b) Re = (v4 rhydr)/m
Re = 62.8 << 1900 (laminar limit)
Typical flow rate is 1.0 cm/s