How Can Roughness Be Measured?

X-ray Scattering

• quantitative (+)

• typically average over several microns(-)

• independent of substrate electrical properties (+)

• buried interfaces (+)

• powerful techniques need synchrotron (-)

Real-Space Probes

• qualitative (-)

• no averaging(+)

• real space probe (+)

• AFM not reliable for lateral atomic-scale imaging in water(-)

• lab. bench top (+)

Ellipsometry

• quantitative (+)

• averaging (-)

• available in Fabs and cleanrooms(+)

• Insufficient e- density contrast (-)

• lab. bench top (+)

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