PPT Slide
Example:
Cu Deposition Mechanism from HF
Cu2+
Si
e-
nucleation
metallic particle growth
Si
Si
metal induced pitting
Cu2+
Cu2+
SiO2
2Cu2+ + Si + 6HF 2Cu + SiF62- + 6H+
SiF62-
Cu
pit
Reported for Cu concentrations in solution of 1 - 5 ppm*
*Morinanga et al., 1994 and Chyan et al., 1996
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