Surface Kinetics Experiments
Unsteady-state Experiments
- Pulse and step HF flow rate during steady water flow.
- Stop HOH after etching started.
- Coverage of surface hydroxyl groups predicted to decrease and surface fluorine coverage to increase.
- Terminate surface with high fluorine coverage and determine bonding when water reintroduced.
- Introduce product SiH4 to determine effects on etching rate and adsorbate coverages.
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Determine the surface coverages of important surface moieties as a function of HF and water partial pressures, temperature, and residence time.