Integrated Processing Apparatus

HF/Vapor

Module

(atm ® 10-7 Torr)

Load Lock

(atm ® 10-7 Torr)

Site for

Clean 2 Module

Site for

RTP Module

Surface Analysis

Facility

(10-10 Torr)

XPS

Auger

TPRS

in situ

FTIR

Ellipsometry

Vacuum Sample

Transfer (10-8 Torr)

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