Property: Thermal Stability vs Duty Cycle

10/50

HFPO

10/400

HFPO

as-deposited

difference

19F NMR Spectra

of Pulsed PECVD

Films

annealed 150 oC

in N2 for 1 h

film from higher duty cycle

lose CF3 terminations

film from lower duty cycle

lose linear CF2 units

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