Summary: Pulsed PECVD

• Pulsed PECVD yields low k (2 < k < 2.4) films

• FC precursors produce FC films with

  • higher F/C ratio
  • more linear CF2 chains
  • less crosslinking / branching

• HFC precursors produce FC films with

  • lower F/C ratio
  • more quaternary carbon
  • more unsaturation

• Thermal decomposition mechanisms depend on amount of crosslinking

  • more crosslinking: loss of terminal groups (e.g. CF3)
  • less crosslinking: loss of linear CF2 chain units of low MW

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