PFC Emissions Reduction
- Gases such as CF4, C2F6, CHF3, C4F8, NF3, SF6
- Used for two main processes:
- Dielectric film CVD chamber cleaning
- Dielectric etch
- These gases have high global warming potentials and long atmospheric lifetimes (CF4 lifetime ~ 50,000 yrs.)
- MOU’s with environmental agencies to reduce PFC emissions (targets not yet set)