PFC Emissions Reduction Strategies
Alternate Chemistries
Process Optimization
Recycle/Recapture
Abatement
NF3 for CVD Chamber Cleans
(Applied Materials, ASTeX)
IFC/HFC for Etch (MIT, NEC)
Membrane Separation
(Air Products)
Cryogenic Distillation
(Air Liquide, Praxair)
Plasma Abatement
(Litmas, Rf Environmental)
Thermal Abatement (Edwards)
Catalytic Decomposition
(Delatech)
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