Litmas "Blue" POU ICP Abatement System

Specifications:

• 1000 W delivered RF Power (1800W supply)

• 1.8 - 2.0 MHz var. freq.

• CE and CSA compliance soon

• 1.5” I.D. x 9” Alumina dielectric

• KF50 flanges

• Solid-state match network (no moving parts)

• 1 gpm ICW

• 15-pin remote control port

• 16 Status LED’s

(Beta unit)

Previous slide

Next slide

Back to first slide

View graphic version