In-fab Beta test

Process Tool: Commercial medium density RIE

Diagnostics: Midac I2000 extractive FTIR with 10 cm cell

MKS PPT 300 AMU open source RGA

Wafers Processed: Blanket photoresist

Flow Conditions:

40-60 sccm CHF3

4-6 sccm CF4

50-70 sccm Ar

Abatement Conditions:

400-1050 W abatement input power

70 sccm O2 addition -OR-

~250 sccm H2O addition

Motorola APRDL in Austin, TX (June-July 1998)

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