Modeling POU Plasma Abatement
1) Isothermal model implemented with semi-quantitative agreement for O2-based abatement of CF4 (A. Fiala, M. Kiehlbauch, S. Mahnovski, D. Graves, “A Model of Point-of-Use Plasma Abatement of Perfluorinated Compounds with and Inductively Coupled Plasma”, Journal of Applied Physics, submitted September 1998.)
2) Full model with neutral energy balance in testing
1) Full implementation of non-isothermal model
2) Model H2O-based abatement
3) Identify and optimize mechanisms of PFC abatement
- Comparison of modeling results to experimental diagnostics