PPT Slide

Comparison of PFC Emissions Reduction Technologies

Assumptions:

Existing fab with 75 CVD chambers representing 60% of total PFC emissions and 125 etch chambers representing 40% of total emissions

• Technologies being applied to retrofit an existing 200 mm fab;

• Capital equipment costs are manufacturer’s list price;

• Installation costs are engineering estimates;

• Utilities costs are cost of utilities in Austin, Texas;

• Cost differences of alternative chemistries are accounted for in the estimates.

M

(Analysis courtesy of Paul T. Brown, Motorola ESIH &

Laurie Beu, Motorola APRDL)

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