Comparison of PFC Emissions Reduction Technologies
The following emissions reductions are assumed to be achievable:
- 50% reduction in emissions from CVD chamber cleans measured in MMTCE for C3F8;
- 95% MMTCE reduction from CVD chamber cleans utilizing either the Applied Materials or ASTeX Astron remote plasma cleans;
- 95% MMTCE reduction in etch emissions utilizing POU plasma abatement;
- 95% MMTCE reduction for both etch and cleans processes utilizing either POU thermal abatement or capture/abate.