PPT Slide
- Experimental observations and established
empirical relationships for metal contamination on
hydrophilic wafer surfaces
hydrophobic wafer surfaces
- Studies on the impact of pH on surface metal contamination
under controlled rinse conditions
- Competitive adsorption model for hydrophilic Si surfaces
- Device-level measurements on the existence and level of
metal contamination in a CMOS gate oxide
This review will cover recent published work on