References
Air Liquide / TI
A. Misra, B. L. Schmidt, L. Hall, J. Sees T. Q. Hurd
“Investigation of Calcium Adsorption on Wafer Surfaces From Deionized Water”
Semicon. Fabtech 9th ed. (1999) 173-178.
IMEC / TI
L. M. Lowenstein, F. Charpin and P. W. Mertens
“Competitive Adsorption of Metal Ions onto Hydrophilic Silicon Surfaces from Aqueous Solution”
J. Electrochem. Soc. 146 (1999) 719-727.
L. M. Lowenstein and P. W. Mertens
“The Rinsing Problem: Effect of Solute-Surface interaction on Wafer Purity”
Solid State Phenom. (Proceedings of UCPSS 98) 65-66 (1999) 1-6.
L. M. Lowenstein and P. W. Mertens
“Adsorption of Metal Ions onto Hydrophilic silicon surfaces from Aqueous Solution: Effect of pH”
J. Electrochem. Soc. 145 (1998) 2841-2847.