PPT Slide
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
'97
'98
'99
'00
'01
'02
'03
'04
'05
'06
'07
'08
180nm
150nm
130nm
100nm
70nm
180nm
130nm
100nm
First Year of IC Production
Dielectric Constant (k)
1997 SIA Roadmap
1998 SIA Roadmap Update
1997
1998
LOW k SIA ROADMAP
Dielectric constant range in Y2000 is 2.5-3.6, but expected to drop to ɚ.5 by 2002
Expect another revision
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