PPT Slide
HISTORY OF INDUSTRY LOW k DEVELOPMENT
• The need for Cu/Low k first introduced in 1994 NTRS
• First screening period (1995-1997) focused on k and thermal stability, since most initial candidates were organic SOD. Evaluation only involved 1 or 2 level metal damascene builds.
• Industry began to shift focus in 1998 to multi-level damascene integration compatibility. Thermal-mechanical properties become key criteria, which exposed deficiencies in many organic materials.
• Serious CVD options entered market in 1999 and continue to rapidly gained DTOR status. The majority of customers now looking at CVD carbon doped oxide as first viable kɛ.0 product.