LOW k MATERIALS FOR ADVANCED INTERCONNECTS

Inorganic CVD Low k: • Proven CVD deposition technology

• Oxide-like properties for ease of integration

• FSG

• Black Diamond

• Fox (HSQ)

• MSQ

• LOSP (T-23)

• Nanoglass

• Silk

• BCB

• Flare

• PAE2

• AS 418

• a:FC

• Parylene AF4

• Copolymer

Inorganic

Organic

Material Type

CVD

Spin-on

Deposition Method

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