PPT Slide
FSG and HSQ Dielectric Constant Comparison
FSG keff £ HSQ keff For Narrow Gaps
Line-to-Line Spacing (µm)
k eff as Function of Line-to-Line Spacing
• FSG k decreases with smaller spacing due
to higher F concentration between gaps
• Use of liner inhibits low dielectric constant
for HSQ in smaller spaces
Below 0.24µm spacing, FSG keff is lower than HSQ due to impact
of USG liner on effective k