Plasma Abatement of PFC’s
- Partner with supplier (Litmas Inc.) to develop, test, and evaluate a POU plasma abatement device for the semiconductor industry.
- Using experimental diagnostic and numerical modeling techniques, develop an understanding of the abatement mechanisms.
Strategy: Place high density plasma source in tool foreline to destroy PFC’s before they are diluted in the rough pump. Use reaction gas additive such as O2, H2, H2O to prevent PFC reformation and produce scrubbable products.