Advantages of POU Plasma Abatement
- Flexible solution… install only as needed. Install phase-in possible.
- Negligible process impact… No process requalifications.
- Zero (or negligible) sub-fab footprint
- Easily controllable… turn on only as needed. No start-up/warm-up time required.
- Retrofittable to installed base… Easily integrated to next generation tool set.
- Minimal expected maintenance… long term trials scheduled
- Energy and water efficient … low operating costs.
- Technology is available now. (Litmas, Rf Environmental, perhaps others…)