Industrial/Academic Interactions
- September 1998: SRC TECHCON 98 (Las Vegas, NV)
- October 1998: Gaseous Electronics Conference (Maui, Hawaii)
- November 1998: American Vacuum Society (Baltimore, MD)
- November 1998: European PFC Task Force meeting (Milan, Italy)
- PFC Leadership group meeting (@ Lam Research, Fremont, CA)
- 1999 Meeting of the Electrochemical Society (Seattle, WA)
(V. Vartanian presenting long-term abatement study results)
Upcoming presentations on POU plasma abatement