PPT Slide
REACTIVE PLASMA COPPER OXIDE REMOVAL
(1) Plasma generates atomic hydrogen
(2) Hydrogen reacts with CuO to form
(3) Cu rebonds to form high quality large
(1) The reduction of copper oxide thin films with hydrogen plasma, Yasushi Sawada, et al., J. Phys. D:Appl. Phys. 29 (1996) 2539-2544.
(2) Surface cleaning of copper by thermal and plasma treatment… S. Hymes, et al., J. Vac. Sci. Technol. B 16(3), May/Jun 1998