PPT Slide
Barrier k Value
1,000Å SiN (k = 7.2)
1,000Å BLOk (k = 5.0)
500Å BLOk (k = 5.0)
k=4.0
4.8
4.5
4.2
k=3.5
4.4
4.0
3.7
k=2.7
4.0
3.2
3.0
ILD k Value
USG
FSG
BD
BARRIER IMPACT ON EFFECTIVE DIELECTRIC CONSTANT
Use of BLOk Can Significantly Reduce Effective k Value
* Data obtained using Raphael™ simulation
Effective Dielectric Constant
Damascene Structure
0.4µm
Barrier/
Etch Stop
1.0µm
1.0µm
ILD
Cu
ILD
ILD
0.25µm
Previous slide
Next slide
Back to first slide
View graphic version