PFCs and Global Warming Potential
Carbon Dioxide Concentration (
Change in Atmospheric Temperature (°C)
Carbon Dioxide Concentration
* Gribbin, The end of the ice ages? New Scientist, 1989.
B Conclusions of the IPCC (Intergovernmental Panel on Climate Change) - First Conference of the Parties, Framework Convention on Climate Change. Berlin, 1995.
- Global warming gases are causative agents*
- “The world’s changing climatic conditions are more than the natural variability of weather.”B
- PFC gases have long lifetime and high global warming potential (GWP)
- 70 to 90% of PFC emissions from a semiconductor fab. are attributed to CVD chambers cleaning.
- The Semiconductor industry has taken a voluntary approach to reduce emissions.