SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing (ERC)

                                                          **  Bringing Sustainability to Semiconductor Manufacturing **

A multi-university research center leading the way to environmentally friendly semiconductor manufacturing, sponsored by the Semiconductor Research Corporation's Global Research Collaboration (GRC) Research Program

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ERC Highlights


Bioaccumulation, Biopersistence, and Toxicity of CMP Nanoparticles in Mammalian and Aquatic Models (SRC 425.048)
PI: Rockford Draper (University of Texas/Dallas), Paul Pantano (University of Texas/Dallas)

Investigation of Speciation in III-V Wet Etching to Mitigate Hazardous Product Formation (SRC 425.049)
PI: Anthony Muscat (University of Arizona), Srini Raghavan (University of Arizona)

Understanding the Sorption Characteristics of III-V Wet Materials on CMP Nanoparticles and Evaluate their Environmental Impact using a Zebrafish Model (SRC 425.050)
PI: Andre Nel (University of California/Los Angeles)

Understanding the Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials (SRC 425.051)
PI: Shyam Aravamudhan (North Carolina A&T)

Aquatic Fate and Toxicity of III/V Semiconductor Materials in the Presence of Chemical-Mechanical Planarization Nanoparticles (SRC 425.052)
PI: Reyes Sierra (University of Arizona), Paul Westerhoff (Arizona State University)




College of Engineering, The University of Arizona

"Bringing Sustainability to Semiconductor Manufacturing"
The Engineering Research Center for Environmentally Benign Semiconductor Manufacturing




The 2015 Simon Karecki Award recipient is
Kun-Chieh “Jack” Chen, a doctoral student in Chemical and Biomolecular Engineering, the Henry Samueli School of Engineering and Applied Sciences at the University of California- Los Angeles (UCLA), investigating alternative, nontoxic chemical etching processes for making silicon chips without perfluoro compounds, the most widely used chemicals in semiconductor manufacturing.  Jack began his college career with a B.S. in Chemical Engineering from the National Taiwan University (NTU) before heading to UCLA.  When Jack arrived at UCLA he passed his preliminary oral exam with flying colors and continued to perform at the highest academic level. Jack’s performance and motivation caught the attention of Dr. Jane Chang, the UCLA William F. Seyer Chair in Materials Electrochemistry, and she recruited him to join her research group under the support of the SRC Engineering Research Center for Environmentally Begin Semiconductor Manufacturing.   Jack’s work has primarily been focused on the area of “Plasma patterning of hard-to-etch metal.”  Jack has published his work in journals and has presented at numerous symposiums and conferences, and his academic excellence, his concern for the earth, and his ability to foster communication with others has been recognized by being a four-time in four-years recipient of the Presidential Award for the top 5% of students at NTU.  Jack has also received the Research Creativity Award from the National Science Council (2010) and has received multiple Research Assistant Scholarships at UCLA.  Jack is scheduled to complete his Ph.D. work at UCLA in the summer of 2016, and we anticipate he will finish much the way he started by demonstrating academic excellence and showing his dedication and concern for the earth’s environment.  Congratulations Jack!

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The Simon Karecki Award Fellowship Fund was created by the Semiconductor Research Corporation (SRC) and the SRC-GRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing (ERC) in memory of Simon Karecki who was a student in the ERC and a SRC Fellow.  Friends and collegues of Simon have come together to create the Simon Karecki Fellowship Fund in his memory to recognize his outstanding individual and research contributions to the research performed at the ERC, and to encourage other talented young researchers in the pursuit of environmental research.  

Selection criteria for eligible ERC graduate student applicants includes their academic excellence, their demonstrated concern for the earth's environment, their demonstrated ability for technical communication, and their demonstrated ability to work with others and foster cooperation. 


2015 Simon Karecki Award:

Chun-Che "Jack" Chen, University of California, Los Angeles

2014 Simon Karecki Award:
Lila Otero-Gonzalez, University of Arizona


2013 Simon Karecki Award:
Kyle Doudrick, Arizona State University
Finalist recognition:
Xiaoyan Liao, University of Arizona


2012 Simon Karecki Award:
Jeffrey Rottman, University of Arizona


2011 Simon Karecki Award:
Wen Zhang, Georgia Institute of Technology

2010 Simon Karecki Award:
Chi-cheng Chiu, University of Texas/Dallas

2009 Simon Karecki Award:
Nandini Venkataraman, University of Arizona

Finalist recognition
Marsaharu Kobayashi, Stanford University

2008 Simon Karecki Award:
Yasa Adi Sampurno, University of Arizona

2007 Simon Karecki Award
Nelson Felix, Cornell University
Finalist recognition
Ashok Muthukumaran and Yasa Adi Sampurno, University of Arizona


2006 Simon Karecki Award:
Rong Chen, Stanford University
Finalist recognition
Jun Yan, University of Arizona and Felix Nelson, Cornell University

2005 Simon Karecki Award:
Subramanian Tamilmani, University of Arizona

2004 Simon Karecki Award:
Hyoungsub Kim, Stanford University
April Ross, MIT


2003 Simon Karecki Award:
Nikhil Krishnan, University of California-Berkeley

2002 Simon Karecki Award:
Casey Finstad, University of Arizona


For more information about the Fund, contact Karen McClure (