|
[ Up ] [ Calender of Events ] [ ERC Annual Review Information ] [ Weekly Seminars ] [ Center News ] [ Vision ] [ Research Activities ] [ Education Activities ] [ Center Boards/Membership ] [ Member Services ] [ Student Services ] [ DiscussionGroups/index.htm ] [ Contact Us ]
| |
|
2009 Simon Karecki Award
Presented to Nandini Venkataraman |
 |
| Anna
and Richard Karecki presented the 2009 Simon Karecki Award to Nandini
Venkataraman at
the ERC Review Meeting in Tucson Arizona |
The 2009 Simon Karecki Award was presented to Nandini
Venkataraman, a student at the University of Arizona, at the annual research
review of the SRC/SEMATECH Engineering Research Center for Environmentally
Benign Semiconductor Manufacturing (ERC) on February 18, 2009. Marsaharu
Kobayashi, Stanford University, was also recognized as a finalist.
This is the eighth presentation of the Simon Karecki Award. This
award is given in memory of Dr. Simon Karecki who was a student in this
Center and an SRC Fellow. Friends and colleagues of Simon have come together
to create the Simon Karecki Fellowship Fund in memory of an outstanding
young man and researcher, and as a way to encourage other talented young
researchers in the pursuit of environmental research.
Nandini is pursuing her PhD in Materials Science and Engineering
at the University of Arizona under the direction of Professor Srini Raghavan.
Her thesis project focuses on back end of line cleaning and involves the
development of environmentally benign chemical systems using the principles
of Electrochemical Impedance Spectroscopy. She is also attempting to develop
a cleaning "end point" method, which would contribute to the reduction of
chemical use. Nandini has presented her research at the Materials Research
Society Spring Conference and at SRC's TECHCON 2008, and she has authored or
co-authored twelve papers and conference presentations. She has a great
understanding of fundamentals and appreciation of ESH aspects and is most
willing to work with others in her research groups and to mentor
undergraduates.
One of the criteria for receiving the Simon Karecki Award is
academic excellence. Nandini has maintained a perfect 4.0 throughout her
graduate work. She has held an Applied Materials Graduate Fellowship for the
last two years, and before that, held a Louis Demer Academic Scholarship
awarded by the University of Arizona. Nandini held an internship at
Intel during the summer of 2008 investigating the electrochemical migration
issues in lead free solder pastes used in packaging. Intel was sufficiently
impressed with her work that they offered her a job and so she will be
joining Intel in Chandler, AZ when she completes her degree later this year.
Nandini's talent for research, leadership skills and strong interest in
environmental issues make her an ideal recipient of the Simon Karecki Award.
|
BEST STUDENT PAPER AWARD
was presented to Kedar Dhane, University of Arizona, at the
SEMATECH Surface Preparation and Cleaning Conference (SPPC),
March 2009 in Austin TX. The SPCC is an annual event which brings
together prominent researchers from the semiconductor industry and the
university community to focus on the current developments and ITRS challenges in
advanced water and mask cleaning and surface preparation technologies for the
32nm node and beyond.
Paper: "Novel Metrology for Application in Wet Surface Preparation of
Patterned Wafers"; Dhane, K., Han, J. Yan, J., Zhang, X., Vermeire, B., Shadman,
F.
|
Semiconductor International Article |
David Lammers, News Editor -- Semiconductor
International, 3/25/2009 6:26:00 AM
Rinse/Dry Steps Get New Look at SPCC
The Sematech Surface Preparation and Cleaning Conference (SPCC) opened with
several presentations on how to reduce water, chemical and energy usage during
cleaning steps. A study conducted at the University of Arizona, with
participation from Samsung Electronics Co., employed on-wafer sensors to monitor
residual impurity concentrations during hot rinse and spin dry steps.
Rinsing and drying techniques are getting more
attention as semiconductor companies seek to become more environmentally benign,
speakers said at the Sematech Surface Preparation and Cleaning Conference (SPCC,
Austin, Texas). Challenges — ranging from cleaning high-aspect-ratio devices to
rinsing and drying layers with hydrophobic low-k dielectrics — are driving
companies to new approaches, often using single-wafer cleaning tools with
shorter process times.
 |
| Jeongnam Han, Samsung Electronics |
Jeongnam Han, a member of the process R&D staff,
said Samsung Electronics Co. (Seoul, South Korea) is using an Electro-Chemical
Residue Sensor (ECRS) developed by
Environmental Metrology
Corp. (EMC, Tucson, Ariz.) a spinoff from the University of Arizona.
 |
| Dhane Kedar, University of Arizona |
Founded in 2003 by Arizona professor Farhang
Shadman, Bert Vermeire and others, the company has signed up several chip
companies to employ the ECRS for in situ monitoring of impurities on wafers.
Multiple ECRSs, built from silicon and poly, are used to monitor the residual
impurity concentrations on a wafer during rinsing and spin drying steps, said
Kedar Dhane, a graduate research assistant at the University of Arizona. Several
companies, including Samsung and Freescale Semiconductor Inc.’s Tempe, Ariz.
facility, are working with EMC, Dhane said.
For the complete article:
http://www.semiconductor.net/article/CA6646483.html
|
The SRC and the SRC/SEMATECH
Engineering Research Center
for Environmentally Benign Semiconductor Manufacturing
SIMON KARECKI FELLOWSHIP FUND
|
|
Karecki Award Presentation. From left, Dr. Muacat, Mr. Karecki,
Casey Finstad, Mrs. Karecki, and Dr. Shadman
Karecki Award Presentation. From the left, Dr. Reif, Mrs Karecki,
Nikhil Krishnan, Mr. Karecki, and Dr. Aitchison
Karecki Award Presentation. From left, Mrs. Karecki, Hyoungsub Kim, April
Ross and Mr. Karecki.
Karecki Award Presentation. Yasa Sampurno and Mrs.
Anna Karecki
Karecki Award Presentation. From left, Mrs. Anna
Karecki, Nandini Venkataraman, Mr. Richad Karecki |
The Simon Karecki Award Fund was
created by the Semiconductor Research Corporation (SRC) and the SRC/SEMATECH
Engineering Research Center for Environmentally Benign Semiconductor
Manufacturing (ERC) in memory of Simon Karecki to recognize his outstanding
contributions to the research performed as a SRC Graduate Fellow at the ERC, and
to encourage other talented young researchers in the pursuit of environmental
research.
Selection criteria include: academic excellence; demonstrated concern for
the earth's environment; demonstrated ability for technical communication; and
demonstrated ability to work with others and foster cooperation.
RECIPIENTS:
2002 Simon Karecki Award Recipient:
Casey Finstad, University of Arizona
2003 Simon Karecki Award Recipient:
Nikhil
Krishnan, University of California-Berkeley
2004 Simon Karecki Award Recipients:
Hyoungsub Kim, Stanford University
April Ross, MIT
2005 Simon Karecki Award Recipient:
Subramanian Tamilmani, University of Arizona
2006 Simon Karecki Award Recipient:
Rong Chen, Stanford University
Finalist recognition:
Jun Yan, University of Arizona and Felix Nelson, Cornell University
2007 Simon
Karecki Award Recipient:
Nelson Felix, Cornell University
Finalist recognition:
Ashok Muthukumaran and Yasa Adi Sampurno, University of Arizona
2008 Simon
Karecki Award Recipient:
Yasa Adi Sampurno, University of Arizona
2009 Simon Karecki Award Recipient:
Nandini Venkataraman, University of Arizona
Finalist recognition:
Marsaharu Kobayashi, Stanford University
For more information about the Fund, contact: Karen McClure
(kmcclure@erc.arizona.edu)
|
|
