SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing (ERC)

                                                          **  Bringing Sustainability to Semiconductor Manufacturing **

A multi-university research center leading the way to environmentally friendly semiconductor manufacturing, sponsored by the Semiconductor Research Corporation's Global Research Collaboration (GRC) Research Program
 


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TECHNICAL REPORTS
 
2015
Under construction
   
2014
Models of wafer topography evolution and chip-scale dishing and erosion pattern effects based on fundamental understanding of 'Pad-in-a-Bottle' CMP processes 2014: Ara Philipossian (UA); Duane Boning (MIT)
Characterization on the tribological, thermal, kinetic and defect attributes of 'Pad-in-a-Bottle' CMP processes 2014: Ara Philipossian (UA); Duane Boning (MIT)
Report on SOPs for SP ICP-MS and TOT analysis with detection limits for nanomaterials 2014: Paul Westerhoff, Pierre Herckes (ASU); James Ranville (Colorado School of Mines)
Results of round-robin laboratory comparison of NM measurement 2014: Paul Westerhoff, Pierre Herckes (ASU); James Ranville (Colorado School of Mines)
Methods for sampling and size determination of nanomaterials in air and water 2014: Paul Westerhoff. Pierre Herckes (ASU); James Ranville (Colorado School of Mines)
Methods to quantify NMs in complex matrices including landfill leachates and biosolids 2014: Paul Westerhoff, Pierre Herckes (ASU); James Ranville (Colorado School of Mines)
Research findings on adsorption of CeO2, Al2O3, and SiO2 NPs on SPBs 2014: Kai Loon Chen (Johns Hopkins)
Summary of research progress:  NPs 2014: Kai Loon Chen (Johns Hopkins)
Summary of data on computational modeling and experimental validation of correlations between nanoparticle size, cellular uptake, toxicity, and dispersant effectiveness 2014: Steven Nielsen, Rockford Draper, Paul Pantano, Gregg Dieckmann, Inga Musselman (UT Dallas)
Modifying and refining the model developed earlier to incorporate the enhancement effect of megasonic applications on rinse performance 2014: Farhang Shadman, Srini Raghavan (UA)
Carry out damage studies on test structures and identify conditions that reduce damage while maintaining rinse efficiency 2014: Farhang Shadman, Srini Raghavan, Manish Keswani (UA)
Online database via the researchers Chembench Webportal including major physical chemical characteristics of nanomaterials 2014: Alexander Tropsha, Denis Fourches (UNC/Chapel Hill)
A series of new computationally derivable descriptors that uniquely characterize nanomaterials 2014: Alexander Tropsha, Denis Fourches (UNC/Chapel Hill)
Formulating the models to predict emissions from plasma processes and assess the effectiveness of the plasma chemistries compared to that of the PFC gases 2014: Jane Chang (UCLA)
Implementing targetr chemistries and carry out plasma etching assessment 2014: Jane Chang (UCLA)
Non-PFC plasma chemistries for patterning complex materials and structures 2014: Jane Chang (UCLA)
Report on microbial toxicity of III/V ions 2014: Reyes Sierra (UA)
Affinity of CMP nanoparticles (colloidal SiO(2), fumed SiO(2), CeO(2), AbO(3) materials obtained from Cabot through the ERC-SRC consortium) for In, Ga, and As 2014: Paul Westerhoff (ASU)
2013  
Graphene heterostructures for logic and interconnects 2013: Shyam Aravamudhan (NC A&T)
Comprehensive short-term (<3 weeks) assessment of critical biological consequences (CBCs) using conventional cyto- and genotoxicity assays, where relevant human cells are exposed to varying physiochemical ENs 2013: Shyam Aravamudhan (NC A&T)
Non-PFC plasma chemistries for patterning complex materials and structures: Assessing the effectiveness of the plasma chemistries compared to that of the PFC gases 2013: Jane Chang, Kun-Chieh Chen  (UCLA)
Non-PFC plasma chemistries for patterning complex materials and structures: Formulating the models to predict emissions from plasma processes 2013: Jane Chang, Kun-Chieh Chen (UCLA)
Model relating bead, counter face, and wafer surface parameters to localized contact pressures at wafer surface, for polishing rate prediction 2013: Ara Philipossian (UA); Duane Boning (MIT)
Counter-face and polyurethane bead size and concentration range selection 2013: Ara Philipossian (UA); Duane Boning (MIT)
Research findings on CMP NP characterization and adsorption of CeO2 NPs on SPBs 2013: Kai Loon Chen (Johns Hopkins)
Summary of research progress:  NPs 2013: Kai Loon Chen (Johns Hopkins)
Data on computational modeling and experimental validation of correlations between nanoparticle size, cellular uptake, toxicity, and dispersant effectiveness 2013: Steven Nielsen, Rockford Draper, Paul Pantano, Gregg Dieckmann, Inga Musselman (UT Dallas)
Evaluating the effect of sound field and solution variables in improving the rinse efficiency 2013: Farhang Shadman, Srini Raghavan, Manish Keswani (UA)
Developing a rinse model using the experimental data that will determine the bottle neck of the rinse process and allow prediction of rinse efficiency under different process conditions 2013: Farhang Shadman, Srini Raghavan, Manish Keswani (UA)
Report describing all developed QNAR models: A specialized database incorporating various info on nanomaterials including their physical/chemical properties and associated biological data emerging from research teams and scientific literature 2013: Alexander Tropsha, Denis Fourches (UNC/Chapel Hill)
Report describing the contents of the database: A specialized database incorporating various info on nanomaterials including their physical/chemical properties and associated biological data emerging from research teams and scientific literature 2013: Alexander Tropsha, Denis Fourches (UNC/Chapel Hill)
The real time detection and measurement of hydroxyl radicals generated in a megasonic field through spectrally resolved sonoluminescence measurements under controlled conditions in a ProSys Cavitation Threshold (CT) cell 2013: Srini Raghavan (UA)
2012  
Non-PFC plasma chemistries for patterning complex materials and structures: Identifying potential low impact gases in target applications 2012: Jane Chang, Kun-Chieh Chen (UCLA)
Non-PFC plasma chemistries for patterning complex materials and structures: Performing thermodynamic calculations to assess potential impact and projected effectiveness 2012: Jane Chang, Kun-Chieh Chen (UCLA)
Non-PFC plasma chemistries for patterning complex materials and structures: The implementing target chemistries and carry out plasma etching assessment 2012: Jane Chang, Kun-Chieh Chen (UCLA)
Stability study on slurries containing polyurethane beads with different sizes and concentrations 2012: Ara Philipossian (UA); Duane Boning (MIT)
Report on draft SOPs for SP ICP-MS and TOT analysis with detection limits for nanomaterials 2012: Paul Westerhoff (ASU); Pierre Herckes (ASU); James Ranville (Colorado School of Mines)
Summary of research progress, which includes unexpected experimental results and lessons learned from unsuccessful experiments: NPs on biological membranes 2012: Kai Loon Chen (Johns Hopkins)
Data on the computational modeling of nanoparticle/dispersant interactions and biological testing of common industrial dispersants for size, toxicity, and bioaccumulation of the resulting dispersed nanoparticles 2012: Steven Nielsen, Rockford Draper, Paul Pantano, Gregg Dieckmann, Inga Musselman (UT Dallas)
Conducting a series of rinsing experiments using the test structures in both batch and single wafer tools to identify key solution and process variables that affect rinsing performance 2012: Farhang Shadman, Davoud Zamani, Srini Raghavan, Manish Keswani (UA)
Fabricating heterogeneous multi-material rinse test structures: consisting of, both on planarized wafers and in patterned wafers with submicron structures and in-situ sensors 2012: Farhang Shadman, Srini Raghavan, Manish Keswani (UA)

TECHNICAL PAPERS
 

2015  
Under construction
2014  
Quantitative resolution of nanoparticle sizes using single particle inductively coupled plasma mass spectrometry with the K-means clustering algorithm Journal of Analytical Atomic Spectrometry, 2014: X. Bi (ASU), S. Lee (ASU), J. Ranville (Colorado School of Mines), S. Prasanna, A. Spanias, P. Herckes (ASU), P. Westerhoff (ASU)
Nanopartaicle size detection limits by single particle ICP-MS for 40 elements Environmental Science & Technology, 2014:  Sungyun Lee (ASU), Xiangyu Bi (ASU), Robert Bruce Reed, James Ranville (Colorado School of Mines), Pierre Herckes (ASU), Paul Westerhoff (ASU)
Contamination of Ultra-High-Purity (UHP) Gas Distribution Systems by Back Diffusion of Impurities Journal of the IEST (under review), 2014: Roy Dittler (UA), Jivaan Jhothiraman (UA), Carl Geisert (Intel Corp.), Farhang Shadman (UA)
Examining the Cellular Uptake and Toxicity of CMP Nanoparticles 225th ECS Meeting, Orlando, FL, May 11-16, 2014: Karshak Kosaraju (UNC/Greensboro), M. Tarannum (NC A&T), S. Crawford (NC A&T), K. Garde (NC A&T), S. Aravamudhan (NC A&T)
Towards Understanding Toxicity of Engineered Nanomaterials Ch.in Nanoscience and Nanoengineering: Advances and Applications, CRC Press, ISBN 9781482231199, 2014: K. Garde (NC A&T), K. Kosaraju, (UNC/Greensboro), S.B. Ravari (UNC/Greensboro), S. Aravamudhan (NC A&T)
Release Kinetics of Multiwalled Carbon Nanotubes Deposited on Silica Surfaces: Quartz Crystal Microbalance with Dissipation (QCMD) Measurements and Modeling Environmental Science & Technology, March 21, 2014: Peng Yi, Kai Loon Chen (Johns Hopkins)
Disaggregation of Heteroaggregates Composed of Multiwalled Carbon Nanotubes and Hematite Nanoparticles Environmental Science: Processes & Impacts, March 28, 2014: Khanh An Huynh, Kai Loon Chen (Johns Hopkins)
Heteroaggregation Reduces Antimicrobial Activity of Silver Nanoparticles: Evidence for Nanoparticle-Cell Proximity Effects Environmental Science & Technology Letters, August 2014: Khanh An Huynh,  J. Michael McCaffery, Kai Loon Chen (Johns Hopkins)
Nanoparticles Meet Cell Membranes: Probing Nonspecific Interactions using Model Membranes Environmental Science & Technology, (just accepted manuscript, December 2014): Kai Loon Chen (Johns Hopkins), Geoffrey Bothun (University of Rhode Island)
A Carbon Nanotube-based Raman-Imaging Immunoassay for Evaluating Tumor Targeting Ligands Analyst, April 2014, 139, 3069: Pooja Bajaj, Carole Mikoryak, Ruhung Wang, Rockford Draper, Gregg Dieckmann, Paul Pantano, Inga Musselman, David Bushdiecker, Pauras Memon (UT/Dallas)
The Importance of an Extensive Elemental Analysis of Single-walled Carbon Nanotube Soot ScienceDirect, , June 2014: Elizabeth Braun, Paul Pantano (UT/Dallas) [Note: limited accessibility to relevant researches and SRC only]
Use of Gel Electrophoresis and Raman Spectroscopy to Characterized the Effect of the Electronic Structure of Single-Walled Carbon Nanotubes on Cellular Uptake Analytical Chemistry, February 24, 2014: Jennifer Chilek Ruhung Wang, Rockford Draper, Paul Pantano (UT/Dallas) [Note: limited accessibility to relevant researches and SRC only]
Computer Modeling of Surface Interactions and Contaminants Transport in Microstructures During the Rinsing of Patterned Semiconductor Wafers Elsevier-Computers and Chemical Engineering, January 1, 2014: M.R. Dodge, F. Shadman (UA)
Thermodynamic Assessment and Experimental Verification of Reactive Ion Etching of Magnetic Metal Elements JVST, April 1, 2014: Taeseung Kim, Jack Kun-Chieh Chen, Jane Chang (UCLA)
   
2013  
Interaction of Multiwalled Carbon Nanotubes with Supported Lipid Bilayers and Vesicles as Model Biological Membranes Environmental Science & Technology, May 6, 2013: Peng Yi, Kai Loon Chen (Johns Hopkins)
Influence of Solution Chemistry on the Release of Multiwalled Carbon Nanotubes from Silica Surfaces Environmental Science & Technology, September 20, 2013: Peng Yi, Kai Loon Chen (Johns Hopkins)
Do Engineered Nanoparticles Penetrate into Cells? J. Nanomed Nanotechnol 2013, 4:5: K. Garde, S. Aravamudhan (NC A&T)
Understanding Cytotoxicity of Engineered Nanomaterials ECS Transactions, 50, 2013:  K. Garde, S. Crawford, S. Aravamudhan (NC A&T)
Effect of Particle Size on the Adsorption and Desorption Properties of Oxide Nanoparticles AIChE Journal 59(5), 1502, 2013: Hao Wang, Farhang Shadman (UA)
Electrochemical Monitoring of Rinsing of Hydrophobic Silicon __, June 27, 2013:  Chieh-Chun Chiang, Srini Raghavan (UA)
   
2012  
Demonstration of Analytical Methods for Engineered Nanomaterials 2012: Sungyun Lee, Kyle Doudrick, Paul Westerhoff (ASU); James Ranville (Colorado School of Mines)
Generation of Toxic Degradation Products by Sonication of Pluronic Dispersants Nanotoxicology, December 2012:  Ruhung Wang, Tyler Hughes, Simon Beck, Samee Vakil, Synyoung Li, Paul Pantano, Rockford Draper (UT/Dallas)
Effects of Spherical Fullerene Nanoparticles on a Dipalmitoyl Phosphatidylcholine Lipid Monolayer: A Course Grain Molecular Dynamics Approach Soft Matter, September 2012: Chi-Chang Ciu, Steven Nielsen (UT/Dallas), Russel DeVane (The Procter and Gamble Company), Wataru Shinoda (AIST, Japan)

For information/questions re ERC reports and publications, contact Karen McClurekmcclure@erc.arizona.edu