| -
2001 - |
| Jan. 4, 2001 |
NO TeleSeminar--HAPPY NEW YEAR! |
| Jan. 11 |
Host: Chris Ober,
Cornell University
Presentation/Guest: Victor Quan Pham, Cornell University
Topic: "Recent Advances In Photoresist Processing Using
Supercritical CO2" (PDF);
Chris Ober "Resist Platforms for 157 nm Lithography" (PDF) |
| Jan. 18 |
CANCELLED |
| Jan. 25 |
Closed Planning Session-Thrust B |
| Feb. 1 |
NO TeleSeminar--Preparation for
Annual Review |
| Feb. 8 |
NO TeleSeminar--ERC Annual Review
in Tucson |
| Feb. 15 |
CANCELLED |
| Feb. 22 |
Host: Kim Ogden, University of
Arizona
Presentation Guests: Erich Gibbs, President, High-Q Inc.;
Marilyn Gould,
Associate Director, Associates of Cape Cod Inc.;
and Morven McAlister, Post Doctoral Researcher, U. of A.
Topic: "Evaluation of Current Methods for Detecting Bacteria in Ultrapure Water
Systems: A New Look at an Old Challenge"
McAlister (PDF);
Gibbs (PDF)
(References-PDF);
Gould (PDF) |
| March 1 |
Host: Farhang Shadman,
University of Arizona
Presentation Guest: Elena Krikanova, IBM Microelectronics; Lilliam
Mena-Acevedo and Robert Morris, University of Arizona
Topics: "UPW Production and Quality Analysis at IBM DI
Water Facility, Burlington, Vermont" (Krikanova) (PDF)
"Novel Processes for Water Purification and Wastewater Treatment:
Catalytic Method for Water Purification" (Mena-Acevedo & Morris) (PDF) |
| March 8 |
Host: Stephen Beaudoin,
Arizona State University
Presentation by: Steve Beaudoin
Topic: "Particle Adhesion and Removal in Semiconductor
Processing" (PDF) |
| March 15 |
Host: Cancelled
Presentation:
Topic: |
| March 22 |
Host: Krishna Saraswat,
Stanford University
Presentation by: Professor B. (Pierre) T. Khuri-Yakub, Stanford
University
Topic: "Zero Waste Dispensing of Chemicals in Lithography and
Backend Processing" (PDF) |
| March 29 |
CANCELLED
Host: Paul McIntyre,
Stanford University
Presentation by: Dr. Keith Milkove, IBM's T.J. Watson Research
Center |
| April 5 |
Host: Rafael Reif,
Massachusetts Institute of Technology
Presentation by: Victor Vartanian, Motorola
Topic: "Fate of Fluorine Determination in Exhaust from
NF3-Based CVD Chamber Cleans" (PDF) |
| April 12 |
Host: Gary Rubloff,
University of Maryland
Presentation by: Michael Lesiecki, Director, MATEC
Topic: "Competency Based Modules for Semiconductor
Manufacturing Education and Training" (PDF) |
| April 19 |
Host: David Graves,
University of California-Berkeley
Presentation by: Frank Greer, UC-Berkeley
Topic: "Radical-Enhanced Atomic Layer Chemical Vapor
Deposition (REALCVD): A summary of work at UC-Berkeley" (PDF)
|
| April 26 |
Host: Greg Raupp,
Arizona State University
Presentations by: Greg Raupp, Associate Dean for Research, College of
Engineering and Applied Sciences, ASU - "Microelectronics Packaging:
Processing Overview, Industry Trends and ESH Needs" (PDF);
Nik Chawla, ASU - "Environmentally Benign Pb-free
Solders for Microelectronics Packaging Applications" (To be
posted at a later date) |
| May 3 |
Host: Jim Baygents,
University of Arizona
Presentation by: Jaime Ludke, University of Arizona
Topic: "CMP Waste Treatment with a Forced-Flow
Electrophoresis Device" (PDF) |
| May 10 |
Host: Anthony Muscat,
University of Arizona
Presentation Guest: Jane Chang, UCLA
Topic: "Ultra-Thin Zirconium Oxide Films Deposited as
Alternative Gate Dielectric"
(PDF) |
| May 17 |
Host: Chris Ober,
Cornell University
Presentation Guest: Wayne Moreau, IBM East Fishkill, NY
Topic: "Applications of Supercritical Fluid Processes
in Semiconductor Lithography" (PDF) |
| May 24 |
Host: Steve Beaudoin,
Arizona State University
Presentation by: Professor Stephen Beaudoin
Topic: "Processing of Model Polymer Dielectrics" (PDF) |
| May 31 |
Host: Duane
Boning, MIT
Presentation/Guest: David White, MIT Microsystems Technology
Laboratories
Topic:
"Characterization of Spatial Endpoint Uniformity of CMP for Reduced
Consumables and Improved Yield" (PDF) |
| June 7 |
Host: Anthony Muscat,
University of Arizona
Presentation Guest: Eray S. Aydil, Department of Engineering,
University of California-Santa Barbara
Topic: "A Diagnostic Method for Monitoring Plasma
Reactor Walls: Multiple Total Internal Reflection Fourier Transform
Infrared Surface Probe" (PDF) |
| June 14 |
Host: Bob Arnold,
University of Arizona
Presentation by: Professor David Mathine, Optical Sciences Center,
University of Arizona
Topic: "A Proposed Toxic Chemical Sensor" (HTML) |
| June 21 |
Host: Krishna Saraswat,
Stanford University
Presentation Guest: Dr. Shahram Abdollahi Alibeik, Stanford University
Topic: "Plasma Etch/Deposition for MEMS" (PDF) |
| June 28 |
Host: Kim Ogden,
University of Arizona
Presentation by:Arturo Ruiz-Yeomans, University of Arizona
Topic: "Biotreatment of Organic Compounds in Semiconductor
Wastewater" (PDF) |
| July 5 |
NO TeleSeminar-4TH OF JULY HOLIDAY |
| July 12 |
Host: David Graves,
University of California-Berkeley
Presentation Guest: Rusty Jewett, President - Litmas Inc.
Topic: "PFC Abatement: Moving from R&D to
Production" (PDF) |
| July 19 |
Host: Srini Raghavan,
University of Arizona
Presentation Guest: Dr. Mel Carter, Senior Research
Scientist, EKC Technology, Inc.
Topic: "Low Concentration Fluoride Chemistries for
Cleaning Sub-0.25 Micron IC Devices" (PDF) |
| July 26 |
No TeleSeminar - Internal
Preparation for Retreat |
| Aug. 2 |
Host: Greg Raupp,
Arizona State University
Presentation by: Greg Raupp, Arizona State University
and Kimberly Ogden, University of Arizona
Topic: "Designing and On-Line Certificate Program in
Microelectronics Manufacturing and Update on Center Education Projects"
(PDF) |
| Aug. 9 |
No TeleSeminar - ERC Retreat at
Stanford University |
| Aug. 16 |
No TeleSeminar |
| Aug. 23 |
Hosts: Ara Philipossian
and Farhang Shadman
Presentation by: Ara Philipossian, University of
Arizona and Mike Schmotzer, University of Arizona
Topics: "Application of Residence Time Distribution Modeling
to the CMP Processes" (Philipossian) (PDF); "Application of Simulation
in UPW Preparation and Distribution" (Schmotzer) (PDF) |
| Aug. 30 |
Host: Srini Raghavan,
University of Arizona
Presentation by: Wayne Huang, doctoral student in Materials
Science and Engineering, University of Arizona
Topic: "Hydroxylamine Based Chemistries for Copper CMP" (PDF) |
| Sept. 6 |
Host: Anthony Muscat,
University of Arizona
Presentation by: Gerardo Montano and Adam Thorsness,
University of Arizona
Topic: " A Surface Chemistry Approach to the Development of
Gas Phase Wafer Cleaning Processes" (PDF) |
| Sept. 13 |
Host: Farhang Shadman, University of Arizona
Presentation by: Bert Vermeire, University of Arizona
Topic: "The Effect of Incidental Hafnium and Zirconium
Contamination on MOS Processes" (PDF) |
| Sept. 20 |
Host: Anthony Muscat,
University of Arizona
Presentation by: Casey Finstad, University of Arizona
Topic: "Gas Phase Surface Preparation Using
Ultraviolet-Activated Chlorine" (PDF) |
| Sept. 27 |
Host: Duane Boning,
MIT
Presentation Guest: Lyle Kirman, Kinetico Incorporated
Topic: "Copper CMP Treatment Options and
Challenges" (PDF) |
| Oct. 4 |
Host: Gary Rubloff,
University of Maryland
Presentation by: Gary W. Rubloff and Soon Cho, University of
Maryland
Topic: Integrated ESH Assessment: Cu CVD Unit Process (PDF) |
| Oct. 11 |
Host: Christopher Ober,
Cornell University
Presentation Guests: David Mount, Vice President of Strategic
Development, SC Fluids, Inc. AND Laura Rothman, Vice President,
SC Fluids Inc.
Topic: Supercritical CO2 Cleaning: An Overview (PDF) |
| Oct. 18 |
Host: Farhang Shadman,
University of Arizona
Presentation by: John DeGenova, Texas Instruments/ University
of Arizona
Topic: Oxidation of Organic Photoresist via Ozone/UPW:
Direct or Indirect Fundamental Mechanisms (PDF) |
| Oct. 25 |
Host: Steve Beaudoin,
Arizona State University
Presentation Guest: James Beckman, Associate Professor, Dept.
of Chemical and Materials Engineering, Arizona State University
Topic: "Water Purification by the DEWVAPORATION
Technique" (PDF) |
| Nov. 1 |
Host: Karen Gleason, MIT
Presentation
by: April Ross, MIT
Topic: "Hot Filament Chemical Vapor Deposition of
Organosilicon Composite Thin Films for Porous Dielectric
Materials" (PDF) |
| Nov. 8 |
Host: Ara Philipossian,
University of Arizona
Presentation by/Guest: Jamshid Sorooshian, U of A
Topic: "CMP Pad Conditioning, Tribology, Fluid Dynamics,
and Pressure Studies" (PDF
1) (PDF
2) (PDF
3) (PDF
4) |
| Nov. 15 |
Host: Anthony Muscat,
University of Arizona
Presentation Guest: Mary Majors, Senior ESH Specialist, Air
Products Electronic Chemicals, CA
Topic: "New Chemical EH&S Challenges: A
Supplier's Perspective" (PDF) |
| Nov. 22 |
No TeleSeminar - THANKSGIVING
HOLIDAY |
| Nov. 29 |
Host: Rafael Reif, MIT
Presentation Guest: Dr. Brian Goolsby, Motorola
Topic: "CVD Emissions--Analysis and Treatment" (PDF) |
| Dec. 6 |
Host: Paul McIntyre,
Stanford University
Presentation by/Guest: Hyoungsub Kim and Yuniarto Widjaja,
Stanford University
Topic: Hyoungsub Kim: "ALD of ZrO2 and HfO2 Gate
Dielectrics from Metal Chloride Precursors - Processing Aspects and
Dielectric Behavior"
Yuniarto Widjaja: "Quantum Chemistry Study of ZrO2 ALD" (PDF1) (PDF2) |
| Dec. 13 |
Host: Anthony Muscat,
University of Arizona
Presentation Guest: Mike Mocella, DuPont Electronic Gases
Topic: "Fluorocarbon Gases for Advanced Dielectric Etch
Applications: A Chemical Manufacturer's Perspective." (PDF) |
| Dec. 20 |
Host: Farhang Shadman,
University of Arizona
Presentation Guest: Jack Martinez, NIST
Topic: "Semiconductor Related Programs at NIST" (PDF) |
| Dec. 27 |
NO TELESEMINAR - CHRISTMAS
HOLIDAY |
