| - 1999 - |
| Jan. 14 |
Proposal for Industrial Outreach
Activities
Ron Chiarello, Stanford University (PDF) |
| Jan. 21 |
Thrust A: Point of Use (POS)
Plasma Abatement of PFCs
Eric Tonnis and Mark Kiehlbauch, UC-Berkeley (HTML) |
| Jan. 28 |
The Role of Organics in Device
Processing: A Discussion
Anthony Muscat, University of Arizona (PDF1)
(PDF2) |
| Feb. 18 |
Thrust B: Electrodeionization
Evaluation in a Semiconductor Fab Recycle System
Russ Parker, Hewlett Packard (PDF) |
| Feb. 25 |
Thrust A: Low Open Area
Endpoint Detection Using a PCA-Based T2-Statistic on Optical Emission
Spectroscopy (OES) Measurements
Duane Boning, David White et al., MIT (PDF) |
| Mar. 4 |
Thrust B: The Iodine and
Methanol Passivation, Engineering and Basic Science Applications
Renee Mo and Francisco Machuca, Stanford University (PDF) |
| Mar. 11 |
Thrust C: Water and Chemical
Usage: Practical Considerations
Tom Roche, Motorola (PDF) |
| Mar. 18 |
No Teleconference |
| April 1 |
Thrust A: Simultaneous
Removal of Particles and Dissolved Copper from Cu-CMP Waste Streams
Srini Raghavan and Yuxia Sun, University of Arizona (PDF) |
| April 8 |
Thrust B: Study on the
Relation Among the Properties of Fluoride Sollution, Si Surface State, and
Cu Deposition on Si
Sangwoo Lim, Sanford (PDF)
In-Situ Monitoring of Metal Contamination Dilute HF Below 100 ppt
Anand Reddy, MIT (PDF) |
| April 15 |
Thrust C: Motorola Wet Tool
UPW Usage Reduction Efforts Using Rinse Resistivity
Kathy McCormack, Motorola and Arturo Ruiz-Yeomans, University of
Arizona (PDF) |
| April 22 |
Thrust A: Etching of Low-k
Materials: Will this be an environmental issue and, if so, how should the
Thrust A research program be addressing it?
Center-wide Group Discussion (PDF) |
| April 29 |
Thrust B: Closed session for
Thrust B only |
| May 6 |
Thrust C: Discussion
on--Water Reduction/Recycle Issues (no presentation materials) |
| May 13 |
Thrust D: Discussion
on--Integration Issues with the Use of Polymer Dielectrics (no
presentation materials) |
| May 27 |
Thrust C: Environmental Value
(EnV) Analysis
Sara Thurwachter and Paul Sheng, UC-Berkeley (PDF) |
| June 10 |
Review of Recent Publications on
Rinse and Metal Ion Adsorption on Si Wafer Surfaces
P. Jerry Chen, SEMATECH (HTML) |
| June 17 |
CO2 Applications in Semiconductor
Industry
Conrad Sorenson, Praxair Inc. (PDF) |
| June 24 |
Integration of a Layout-Dependent
CMP Model with Run by Run Methods for Improved CMP Control
Taber Smith and Simon Fang, MIT (PPT) |
| July 8 |
Education Thrust: Summer of
'99 Update
Sally Clement (no presentation materials) |
| Sept. 2 |
No Teleconference |
| Sept. 9 |
Thrust A: Use of Air-Gaps as Low-K Dielectric
Benjamin P. Shieh, Graduate Student, Stanford University (PDF) |
| Sept. 16 |
Thrust B: Ozonated Water Research Directions
Sangwoo Lim, Stanford University (PDF1)
(PDF2)
John DeGenova, University of Arizona (PDF) |
| Sept. 23 |
Thrust C: Engineered Learning Systems for Engineering and Education
Professor Gary Rubloff, University of Maryland ( PDF ) |
| Sept. 30 |
Thrust D: Challenges for 157 nm Lithography
Roderick R. Kunz, Ph.D., Senior Staff Member, MIT Lincoln Laboratory
(
PDF ) |
| Oct. 7 |
Thrust A: Computer Simulation of PFC Abatement: Mechanisms and Neutral Transport
Mark Kiehlbauch, University of California-Berkeley
Relevant Archived Presentation: (PDF)
Current Presentation: (PDF) |
| Oct. 14 |
Thrust B: Cu Deposition: Macroscopic and Atomistic Perspectives
Anand Reddy, MIT (PDF)
Sang-Woo Lim, Stanford (PDF) |
| Oct. 21 |
Thrust C: Real-Time Mocro-Biocontamination Monitor for Ultrapure Water Systems
Jon Sjogren, Center for Microcontamination Control, U of Arizona (PDF) |
| Oct. 28 |
Thrust D: Analysis of Particle Adhesion to Thin Films
Kevin Cooper, Arizona State University
(PDF1) (PDF2)
(PDF3)
(PDF4) |
| Nov. 4 |
Thrust A: Update on Alternative Chemistries for Dielectric Etch Applications
Ritwik Chatterjee and Laura Pruette, MIT (PDF) |
| Nov. 11 |
No TeleSeminar - Veterans Day |
| Nov. 18 |
Thrust C: Probing Copper Adsorbates at Silica
Surfaces Using Integrated Planar Optical Waveguides
Sergio Mendes, U of Arizona (PDF)
|
| Nov. 25 |
No TeleSeminar - Thanksgiving |
| Dec. 2 |
Thrust D: Supercritical Fluid Technologies
Gina Weibel, Cornell University
(PDF1)
(PDF2) |
| Dec. 9 |
Thrust A: Treatment of Cu-CMP Wastes by
Electrocoagulation
James Baygents and Yuxia Sun, U of Arizona (PDF) |
| Dec. 16 |
All Center TeleSeminar – Prepare Annual Report |
| Dec. 23, 30 |
No TeleSeminar – Christmas |
